JPH0171856U - - Google Patents
Info
- Publication number
- JPH0171856U JPH0171856U JP1987166877U JP16687787U JPH0171856U JP H0171856 U JPH0171856 U JP H0171856U JP 1987166877 U JP1987166877 U JP 1987166877U JP 16687787 U JP16687787 U JP 16687787U JP H0171856 U JPH0171856 U JP H0171856U
- Authority
- JP
- Japan
- Prior art keywords
- gate valve
- main body
- sample
- analyzer
- exhaust chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166877U JP2519083Y2 (ja) | 1987-10-31 | 1987-10-31 | 試料交換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166877U JP2519083Y2 (ja) | 1987-10-31 | 1987-10-31 | 試料交換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0171856U true JPH0171856U (en]) | 1989-05-15 |
| JP2519083Y2 JP2519083Y2 (ja) | 1996-12-04 |
Family
ID=31454656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987166877U Expired - Lifetime JP2519083Y2 (ja) | 1987-10-31 | 1987-10-31 | 試料交換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2519083Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019187352A1 (ja) * | 2018-03-30 | 2019-10-03 | 株式会社島津製作所 | 真空装置及び質量分析装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58167439U (ja) * | 1982-04-30 | 1983-11-08 | 株式会社島津製作所 | 試料導入装置 |
-
1987
- 1987-10-31 JP JP1987166877U patent/JP2519083Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58167439U (ja) * | 1982-04-30 | 1983-11-08 | 株式会社島津製作所 | 試料導入装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019187352A1 (ja) * | 2018-03-30 | 2019-10-03 | 株式会社島津製作所 | 真空装置及び質量分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2519083Y2 (ja) | 1996-12-04 |